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Design of an interferometric test station for parallel inspection of MEMS
Creator
- Europeana
- Schäffel, Christoph
- Michael, S.
- Paris, R.
- Frank, A.
- Zeike, N.
- Gastinger, K.
- Kujawinska, M.
- Zeitner, U.
- Beer, S.
Publisher
- TU Ilmenau, Ilmenau
Type of item
- literature
Date
- 2011
- 2011
Creator
- Europeana
- Schäffel, Christoph
- Michael, S.
- Paris, R.
- Frank, A.
- Zeike, N.
- Gastinger, K.
- Kujawinska, M.
- Zeitner, U.
- Beer, S.
Publisher
- TU Ilmenau, Ilmenau
Type of item
- literature
Date
- 2011
- 2011
Providing institution
Aggregator
Rights statement for the media in this item (unless otherwise specified)
- http://creativecommons.org/licenses/by-nc-nd/3.0/
- http://creativecommons.org/licenses/by-nc-nd/3.0/
Rights
- http://www.dmg-lib.org/dmglib/main/portal.jsp?mainNaviState=site.oairights
Identifier
- dmg:29452009
- http://www.dmg-lib.org/dmglib/handler?docum=29452009
Language
- en
Relations
- Ilmenau University of Technology, Germany
Year
- 2011
Providing country
- Europe
Collection name
First time published on Europeana
- 2013-11-25T17:01:28.339Z
Last time updated from providing institution
- 2013-11-25T17:01:28.339Z