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Chemical Vapour Deposition of Undoped and Oxygen Doped Copper (I) Nitride
In science and technology there is a steadily increased demand of new materials and new materials production processes since they create new application areas as well as improved production technology and economy. This thesis includes development and studies of a chemical vapour deposition (CVD) process for growth of thin films of the metastable material copper nitride, Cu3N, which i…
Contributors
- Carlsson Jan-Otto Professor
- Ottosson Mikael PhD
- Choy Kwang-Leong Professor
- Uppsala universitet Teknisk-naturvetenskapliga vetenskapsområdet Kemiska sektionen Institutionen för materialkemi
Creator
- Fallberg Anna 1980- , Uppsala universitet, Institutionen för materialkemi
Publisher
- Acta Universitatis Upsaliensis
Date
- 2010
- 2010-01-08
- 2009-12-09
- 2009-12-09
- 2010-01-08
- 2010
Contributors
- Carlsson Jan-Otto Professor
- Ottosson Mikael PhD
- Choy Kwang-Leong Professor
- Uppsala universitet Teknisk-naturvetenskapliga vetenskapsområdet Kemiska sektionen Institutionen för materialkemi
Creator
- Fallberg Anna 1980- , Uppsala universitet, Institutionen för materialkemi
Publisher
- Acta Universitatis Upsaliensis
Date
- 2010
- 2010-01-08
- 2009-12-09
- 2009-12-09
- 2010-01-08
- 2010
Providing institution
Aggregator
Rights statement for the media in this item (unless otherwise specified)
- http://rightsstatements.org/vocab/InC/1.0/
- http://rightsstatements.org/vocab/InC/1.0/
Identifier
- oai:DiVA.org:uu-110533
Format
- electronic52
- electronic
- 52
Language
- en
- en
Is part of
- http://data.theeuropeanlibrary.org/Collection/a1041
Relations
- Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology1651-6214691
Year
- 2010
Providing country
- Sweden
Collection name
First time published on Europeana
- 2014-09-07T10:46:32.384Z
Last time updated from providing institution
- 2014-09-07T10:46:32.384Z