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Rapid prototyping of magnetic tunnel junctions with focused ion beam processes
Submicron sized Magnetic tunnel junctions (MTJs) are most often fabricated by time-consuming and expensive e-beam lithography. From a research and development perspective, a short lead time is one of the major concerns. Here, a rapid process scheme for fabrication of micrometer size MTJs with focused ion beam processes is presented. The magnetic properties of the fabricated junctions is investi…
Contributors
- Uppsala universitet Teknisk-naturvetenskapliga vetenskapsområdet Tekniska sektionen Institutionen för teknikvetenskaper Mikrosystemteknik
Creator
- Persson Anders , Uppsala universitet, Mikrosystemteknik
- Thornell Greger , Uppsala universitet, Mikrosystemteknik
- Nguyen Hugo , Uppsala universitet, Mikrosystemteknik
Publisher
- IOP
Type of item
- Refereed
- Article in journal
- article
- Art
Date
- 2010
- 2010-12-01
- 2010-12-01
- 2010
Contributors
- Uppsala universitet Teknisk-naturvetenskapliga vetenskapsområdet Tekniska sektionen Institutionen för teknikvetenskaper Mikrosystemteknik
Creator
- Persson Anders , Uppsala universitet, Mikrosystemteknik
- Thornell Greger , Uppsala universitet, Mikrosystemteknik
- Nguyen Hugo , Uppsala universitet, Mikrosystemteknik
Publisher
- IOP
Type of item
- Refereed
- Article in journal
- article
- Art
Date
- 2010
- 2010-12-01
- 2010-12-01
- 2010
Providing institution
Aggregator
Rights statement for the media in this item (unless otherwise specified)
- http://rightsstatements.org/vocab/InC/1.0/
- http://rightsstatements.org/vocab/InC/1.0/
Identifier
- oai:DiVA.org:uu-134753
Format
- electronic
- electronic
- 055039
Language
- en
Is part of
- http://data.theeuropeanlibrary.org/Collection/a1041
Relations
- Journal of Micromechanics and Microengineering0960-1317205055039
Year
- 2010
Providing country
- Sweden
Collection name
First time published on Europeana
- 2014-09-07T11:19:10.117Z
Last time updated from providing institution
- 2014-09-07T11:19:10.117Z